The Technology of TFT LCD Photomask
Abstract:
Although the basics of TFT LCD technologies were
developed as early as in the 1980s, the manufacturing technologies are
continuously improved for many years for bigger substrate and higher product
yield. Now a day, the price of TFT LCD is competitive enough has become the
mainstream display in computer monitors and TV application. Taiwan has
become the worlds
largest TFT LCD producer supplying over 45% of TFT LCD products worldwide,
exceeding Korean and Japanese. In spite of the successfulness in volume
production, the Taiwanese TFT LCD producers still rely on foreign
technologies in some of the key components. A short report on current TFT
LCD status and large photomask technology for TFT LCD will be presented.
Biography:
Dr. Robert Tsai()
was the past chairman of EOA in Bay Area Chapter in 1995. He obtained his
Ph. D. in Material Science from University of Virginia and a pioneer in LCD
technology as early as in 1974. He was with Intel to develop the first LCD
watch production line in US and later sold to Timex. In 1976, he joined the
Hughes Aircraft developed the worlds first LCD TV with active matrix on
silicon wafer. Dr. Tsai was well known in Large Area Display technology
when he was in charge of the laser addressed LCD business unit in Single Co.
in the 80s. He designed a laser scanning system for direct write on
silicon wafer for ASIC proto-typing in 1986. He also explored the LTPS
technology with Excimer laser to fabricate
polysilicon from amorphous silicon on a sheet of
glass. Dr. Tsai had spent 8 years in Singapore for
semiconductor manufacturing and later was appointed by Chartered
Semiconductor to manage Fab 5 ( a joint venture between Agere and
Charter). Dr. Tsai returned to Taiwan with his friends in 2003 and started
the AIPC for TFT LCD Large Photomask manufacturing. Currently AiPC (Allied
Integrated Patterning Corporation) is the only local supplier that has the
capability in producing TFT LCD photomasks for that local industry.
