A늌W  ݷ֕   The Electro-Optics Association  The Photonics Society of Chinese-Americans Northern California Chapter

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2015 Seminar

20150314 (Stanford, CA)

The power Atomic Layer Deposition and its Applications

Abstract:

Electronic semiconductor devices, display and optical coatings are the main applications benefiting from thin-film deposition technology. Traditional CVD (chemical Vapor Deposition) and PECVD (Plasma Enhanced CVD) with the fast deposition rate, were know as the main approaches to deposit thin film layers than time consuming ALD (Atomic Layer deposition) process.

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Although tradition CVD has been serving the industry with various thin films ranging from several micrometers(10,000A) to 10-100 nanometer (100-1000A) level, ALD process, which deposits conformal thin films at A level for , is demonstrating its unique benefits due to the continuous demand of reducing feature dimensions. Meanwhile, display industry has been driven by customers due to the emerging demand of flexible and foldable devices. ALD has also been positioned as the critical and essential solution to be adopted.

 

* ALD fundamentals to be introduced and industry overview to be provided during the seminar for discussions.

 

Bio: 

 

Yao-Hung Yang received his dual Engineering Bachelors degrees from National Taiwan University, then he received MSCEE, MSME and later on Engineer degree from design/construction integration and Mechanical Engineering from Stanford University, He is the Director of Program Management for ALD group at Veeco Instrument Corporation managing R&D projects for multiple ALD applications with various substrate size and materials. He started semiconductor career as design engineer, project manager, engineering manager, then program manager with Applied Materials managed multiple PECVD and ETCH chambers which have huge install base at TSMC, Intel and Samsung electronics. He is currently managing ALD tools with FAST-ALD capability to collaborate with technology group developing critical applications for various substrate materials and dimensions.

 

More details about Yao-Hung Yang can be found at "https://www.linkedin.com/in/honyang"

Yao-Hung Yang (408)386-9228